In situ dielectric stacks

In situ rapid thermal etch and rapid thermal oxidation

In-line processing for forming a silicon nitride film

In-situ oxide capping after CVD low k deposition

Incorporation of nitrogen into high k dielectric film

InN/InP/TiO 2 photosensitized electrode

InN/TiO 2 photosensitized electrode

Insulating film and method of forming the same

Insulating film forming method and substrate processing method

Insulation structure for high temperature conditions and...

Integrated ashing and implant annealing method

Integrated ashing and implant annealing method using ozone

Integrated circuitry and semiconductor processing method of form

Integration of buried oxide layers with crystalline layers

Interfacial oxidation process for high-k gate dielectric...

Interfacial oxidation process for high-k gate dielectric...

Intermittent pulsed oxidation process

Intrinsic dual gate oxide MOSFET using a damascene gate process

Ion implanted microscale and nanoscale device method

Ion-assisted oxidation methods and the resulting structures