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Active wafer cooling during damage engineering implant to...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Anisotropic formation process of oxide layers for vertical...

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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and method for heat-treating semiconductor substrate

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Apparatus and method for improving AC coupling on circuit...

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Apparatus and method for oxidizing silicon substrates

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Apparatus and process for controlling the temperature of a...

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Apparatus for stabilizing high pressure oxidation of a...

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Article comprising a gallium layer on a GaAs-based semiconductor

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Atomic layer deposition (ALD) method with enhanced...

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