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Passivation of aluminum nitride substrates

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Peripheral processing method and method of manufacturing a...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Planarization using plasma oxidized amorphous silicon

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Plasma enhanced chemical vapor deposition process

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Plasma gate oxidation process using pulsed RF source power

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Plasma method and apparatus for processing a substrate

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Plasma method and apparatus for processing a substrate

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Plasma nitridation for reduced leakage gate dielectric layers

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Plasma nitriding method, method for manufacturing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Plasma oxidizing method, plasma processing apparatus, and...

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Plasma oxidizing method, storage medium, and plasma...

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Plasma processing device and a method of plasma process

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Plasma processing method and computer storage medium

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Plasma processing method and method for manufacturing an...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Pretreatment for an electroplating process and an...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Prevention of edge stain in silicon wafers by ozone dipping

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Process for depositing a Ta2O5 dielectric layer

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Process for fabricating an ONO floating-gate electrode in a...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Process for forming a thin oxide layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Process for forming coatings on semiconductor devices

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