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Techniques for providing decoupling capacitance

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Temperature spike for uniform nitridization of ultra-thin...

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Thermal nitrogen distribution method to improve uniformity...

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Thermal processing furnace, gas delivery system therefor,...

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Thin film transistor, method of manufacturing same, display...

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Transistor fabrication methods

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Transistor fabrication methods comprising selective wet...

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Transistor fabrication methods comprising selective...

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Transistor having an embedded tensile strain layer with...

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Transistor structures, methods of incorporating nitrogen...

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Trench capacitor structure and process for applying a...

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TWO-STEP OXIDATION PROCESS FOR OXIDIZING A SILICON SUBSTRATE...

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Ultra-thin SiO2using N2O as the oxidant

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Use of oxalyl chloride to form chloride-doped silicon dioxide fi

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UV-enhanced oxy-nitridation of semiconductor substrates

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Versatile plasma processing system for producing oxidation...

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Versatile system for forming uniform wafer surfaces

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Wafer holder for thermal processing apparatus

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Wafer storing system having vessel coated with ozone-proof...

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Water vapor annealing process

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