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Techniques for forming contact holes through to a silicon...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Techniques for forming trenches in a silicon layer of a substrat

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Techniques for improving etching in a plasma processing chamber

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Techniques for plasma etching silicon-germanium

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Techniques for reduced dishing in chemical mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Techniques for removal of photolithographic films

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Techniques for the use of amorphous carbon (APF) for various...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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TEM sample preparation using transparent defect protective...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Test structure and method for detecting via contact shorting...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Texturing semiconductor substrates

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Thermal annealing method for preventing defects in doped...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Thermal gradient control of high aspect ratio etching and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Thermal inkjet printhead processing with silicon etching

Semiconductor device manufacturing: process – Chemical etching
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Thermal isolation using vertical structures

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Thermal oxide etch technique

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Thermal treatment of a semiconductor layer

Semiconductor device manufacturing: process – Chemical etching
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Thick thermal oxide layers and isolation regions in a...

Semiconductor device manufacturing: process – Chemical etching
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Thin film deposition method, capacitor device and method for fab

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Thin film device and method for manufacturing thin film device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Thin film forming method and apparatus

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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