Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate
2011-06-07
2011-06-07
Coleman, W. David (Department: 2823)
Semiconductor device manufacturing: process
Chemical etching
Liquid phase etching
C257SE21309, C136S256000, C216S099000, C510S524000
Reexamination Certificate
active
07955989
ABSTRACT:
Semiconductors are textured with aqueous solutions containing non-volatile alkoxylated glycols, their ethers and ether acetate derivatives having molecular weights of 170 or greater and flash points of 75° C. or greater. The textured semiconductors can be used in the manufacture of photovoltaic devices.
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Barr Robert K.
O'Connor Corey
Coleman W. David
Piskorski John J.
Rohm and Haas Electronic Materials LLC
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