Microelectronic device fabricating methods

Microfabricated micro fluid channels

Micropatterning method

Microwave enhanced CVD system under magnetic field

Microwave excitation plasma processing apparatus and microwave e

Microwave-activated etching of dielectric layers

Miniaturized imaging device with integrated circuit...

Minimization of line width variation in photolithography

Modified DARC stack for resist patterning

Multi-chamber system having compact installation set-up for...

Multi-layer gate stack

Multi-layer hard mask structure for etching deep trench in...

Multi-layer hard mask structure for etching deep trench in...

Multi-level integrated circuit for wide-gap substrate bonding

Multi-run selective pattern and etch wafer process

Multi-step chemical mechanical polish (CMP) planarizing...

Multi-step EBR process for photoresist removal

Multi-step method for etching strain gate recesses

Multi-step plasma etch method for plasma etch processing a...

Multi-step plasma treatment method to improve CU...