Microfabricated micro fluid channels

Details Microfabricated micro fluid channels Microfabricated micro fluid channels

2007-03-06

2010-06-15

Toledo, Fernando L (Department: 2895)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

C422S105000, C438S422000, C438S700000, C438S706000

Reexamination Certificate

active

07737045

ABSTRACT:
A fluid delivery system including a first substrate having a micro-channel and a well both formed through the first substrate. The fluid delivery system also includes a second substrate and a delivery channel. The second substrate is on the first substrate and the delivery channel is formed between the first and second substrates. The delivery channel provides fluid communication between the micro-channel and the well.

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