LandOfFree - US Patents - Listing for Semiconductor device manufacturing: process,Chemical etching,Combined with coating step

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Partial via hard mask open on low-k dual damascene etch with...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Passivation layer for a metal film to prevent metal corrosion

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Passivation of porous semiconductors for improved optoelectronic

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Pattern forming method and manufacturing method of...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Patterned structures fabricated by printing mask over...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Patterning sub-lithographic features with variable widths

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Photolithographic patterning process using a carbon hard...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Photoresist scum for copper dual damascene process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Pillar process for copper interconnect scheme

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Pitch multiplication using self-assembling materials

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Pitch reduction

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Pitch reduction

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Pitch reduction in semiconductor fabrication

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Pitch reduction using a set of offset masks

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Planarization of a patterned structure on a substrate using an i

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Planarization of insulation film using low wettingness surface

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Planarization process for semiconductor substrates

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Planarization process using tailored etchback and CMP

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Plasma and electron beam etching device and method