Passivation layer for a metal film to prevent metal corrosion

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

438696, 438705, 438720, 438734, H01L 21302

Patent

active

058541349

ABSTRACT:
The invention provides a method of fabricating corrosion free metal lines. The method involves forming a thin polymeric passivation layer 30 over the metal layer 20 immediately after the metal deposition and before any photolithographic or etching processes. The polymeric passivation layer 30 is formed using a F-containing gas plasma treatment. The passivation layer prevents corrosion of the metal layer before a metal etch. The passivation layer is preferably composed of a polymeric of C, O, and F and has a thickness in a range of between about 40 and 80 .ANG.. The passivation layer is formed using a F-containing plasma treatment at a power of between 225 and 275 W, a pressure between about 80 and 120 mtorr, a CHF.sub.3 flow between about 40 and 60 sccm and for a duration between about 10 to 30 seconds. Following this, the metal layer is patterned using photo and etch steps.

REFERENCES:
patent: 5202291 (1993-04-01), Charvat et al.
patent: 5378653 (1995-01-01), Yanagida
patent: 5397432 (1995-03-01), Konno et al.
patent: 5399236 (1995-03-01), Ha et al.
patent: 5451293 (1995-09-01), Tabara
"In Line Plasma Etching of Aluminum"; Proc-Electrochemical Soc.; 1982; 82-6-Proc. Sym Plasma Process, 3rd, 1981; abstract only; Donohoe.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Passivation layer for a metal film to prevent metal corrosion does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Passivation layer for a metal film to prevent metal corrosion, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Passivation layer for a metal film to prevent metal corrosion will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1424178

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.