Apparatus and method for reactive atom plasma processing for...

Apparatus and method for surface treatment

Apparatus and method of producing a negative ion plasma

Apparatus and methods for upgraded substrate processing...

Apparatus for and method of processing an object to be...

Apparatus for generating gas plasma, gas composition for...

Apparatus for microwave processing in a magnetic field

Application of the CVD bilayer ARC as a hard mask for...

Base material cutting method, base material cutting...

Capture system employing annular fluid stream

Capture system employing diverter fluid nozzle

Cleaning gases and etching gases

Cleaning of multicompositional etchant residues

Coating for forming a high definition aperture

Composite shadow ring equipped with a sacrificial inner ring

Composition and method for polishing...

Confinement device for use in dry etching of substrate...

Confinement ring drive

Contaminant removal by laser-accelerated fluid

Control of etch selectivity