Confinement ring drive

Details Confinement ring drive Confinement ring drive

2008-03-04

2011-12-20

Olsen, Allan (Department: 1716)

Etching a substrate: processes

Gas phase etching of substrate

With measuring, testing, or inspecting

C216S067000

Reexamination Certificate

active

08080168

ABSTRACT:
A confinement assembly for a semiconductor processing chamber is provided. The confinement assembly includes a plurality of confinement rings disposed over each other. Each of the plurality of confinement rings are separated by a space and each of the plurality of confinement rings have a plurality of holes defined therein. A plunger extending through aligned holes of corresponding confinement rings is provided. The plunger is moveable in a plane substantially orthogonal to the confinement rings. A proportional adjustment support is affixed to the plunger. The proportional adjustment support is configured to support the confinement rings, such that as the plunger moves in the plane, the space separating each of the plurality of confinement rings is proportionally adjusted. In one embodiment the proportional adjustment support is a bellows sleeve. A semiconductor processing chamber and a method for confining a plasma in an etch chamber having a plurality of confinement rings are provided.

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