Method for measuring width of bottom under cut during...

Method for optimizing a gap for plasma processing

Method for patterning and etching film layers of semiconductor d

Method for performing plasma process on particles

Method for planarization etch with in-situ monitoring by...

Method for plasma etching of a perovskite oxide thin film

Method for plasma etching of high-K dielectric materials

Method for plasma processing at high pressure

Method for plasma treatment and apparatus for plasma treatment

Method for preventing contamination in a plasma process chamber

Method for preventing corrosion of a dielectric material

Method for processing silicon using etching processes

Method for processing substrates using gaseous silicon...

Method for producing structures having a high aspect ratio...

Method for producing tips for atomic force microscopes

Method for protecting a paper security document or...

Method for real time metal ETCH critical dimension control

Method for realizing microchannels in an integrated structure

Method for reducing the amount of perfluorocompound gas...

Method for removing a halogen-containing residue