LandOfFree - US Patents - Listing for Etching a substrate: processes,Gas phase etching of substrate

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Method for controlling CD during an etch process

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Method for controlling plasma processor

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Method for detecting an end point of etching in a...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Method for detecting end point of plasma etching, and plasma...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Method for detecting etching endpoint and etching apparatus and

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Method for detecting etching endpoint, and etching apparatus and

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Method for detecting the end point by using matrix

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Method for dry etching of transition metals

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Method for dry-etching a platinum thin film

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Method for enhanced inductive coupling to plasmas with reduced s

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Method for etch fabrication of iridium-based electrode structure

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Method for etching a diamond film

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Method for etching a gold metal layer using a titanium hardmask

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate

Method for etching aluminum metal films

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Method for etching an object using a plasma and an object...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate

Method for etching ferroelectric film

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...

Method for etching low k dielectrics

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Method for etching oxide film in plasma etching system

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate

Method for etching passivation layers and antireflective...