Method for manufacturing resonant device

Method for measuring etch rates during a release process

Method for measuring width of bottom under cut during...

Method for optimizing a gap for plasma processing

Method for patterning and etching film layers of semiconductor d

Method for performing plasma process on particles

Method for planarization etch with in-situ monitoring by...

Method for plasma etching of a perovskite oxide thin film

Method for plasma etching of high-K dielectric materials

Method for plasma processing at high pressure

Method for plasma treatment and apparatus for plasma treatment

Method for preventing contamination in a plasma process chamber

Method for preventing corrosion of a dielectric material

Method for processing silicon using etching processes

Method for processing substrates using gaseous silicon...

Method for producing structures having a high aspect ratio...

Method for producing tips for atomic force microscopes

Method for protecting a paper security document or...

Method for real time metal ETCH critical dimension control

Method for realizing microchannels in an integrated structure