Method of fabricating multiple nanowires of uniform length...

Method of fabrication of a microfluidic device

Method of forming a microstructure

Method of forming stepped structures employing imprint...

Method of forming stepped structures employing imprint...

Method of HF vapor release of microstructures

Method of layout compaction

Method of making a bridge-supported accelerometer structure

Method of making a capacitance type acceleration sensor

Method of making a micro-actuator device

Method of making alignment grooves in an optical connector suppo

Method of making an X-Y axis dual-mass tuning fork gyroscope...

Method of making an X-Y axis dual-mass tuning fork gyroscope...

Method of making micromachined device with ground plane under se

Method of manufacturing a bonding substrate

Method of manufacturing a micro-valve

Method of manufacturing a micromachined thermal flowmeter

Method of manufacturing a micromechanical component

Method of manufacturing a motion sensor

Method of manufacturing a semiconductor device that uses a calib