Accelerometer without proof mass

Angle control of multi-cavity molded components for MEMS and...

Angle control of multi-cavity molded components for MEMS and...

Apparatus and method for detecting an endpoint in a vapor...

Apparatus and method for manufacturing an intracutaneous...

Backside silicon removal for face down chip analysis

Bonding for a micro-electro-mechanical system (MEMS) and...

Broad spectrum emitter array and methods for fabrication...

Bulk removal, transport and storage fixture for small batch-fabr

Cantilever microstructure and fabrication method thereof

Chemical microreactor and method thereof

Coated microfluidic delivery system

Conductive thin film pattern and method of forming the same,...

Corrosion protection for micromechanical metal layers

Deep reactive ion etching process and microelectromechanical...

Deep reactive ion etching process and microelectromechanical...

Deep-well lithography process for forming...

Design of a novel tactile sensor

Dry etch release of MEMS structures

Dry etching method of multilayer film