Technique for manufacturing micro-electro mechanical structures
Techniques of anisotropic wet etch micromachining for comb...
Thermal sensor/actuator in semiconductor material
Thermally efficient micromachined device
Thin film inductive write head with minimal organic insulation m
Thin film-planar structure and method for producing the same
Three dimensional etching process
Top-via etch technique for forming dielectric membranes
Tungsten coating for improved wear resistance and...