Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate
2006-03-28
2006-03-28
Olsen, Allan (Department: 1763)
Etching a substrate: processes
Etching of semiconductor material to produce an article...
C216S087000, C216S095000, C216S099000, C216S100000, C117S001000, C117S002000, C117S075000, C117S083000, C117S087000, C977S726000
Reexamination Certificate
active
07018549
ABSTRACT:
A method is described for fabricating multiple nanowires of uniform length from a single precursor nucleation particle. The method includes growing a first nanowire segment from a nanoparticle and growing a second nanowire segment between the first nanowire segment and the nanoparticle. The first nanowire segment and the second nanowire segment have a different solubility.
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Chau Robert S.
Hareland Scott A.
Metz Matthew V.
Blakely , Sokoloff, Taylor & Zafman LLP
Intel Corporation
Olsen Allan
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