Method of making an X-Y axis dual-mass tuning fork gyroscope...

Details Method of making an X-Y axis dual-mass tuning fork gyroscope... Method of making an X-Y axis dual-mass tuning fork gyroscope...

2005-09-06

2005-09-06

Ahmed, Shamim (Department: 1765)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C216S067000, C073S504020

Reexamination Certificate

active

06939473

ABSTRACT:
A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly wafers provides a hermetic barrier between the masses and an ambient environment.

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