4. Etching a substrate: processes
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Hard masking method for forming patterned oxygen containing plas

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent

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Hard masking method for forming patterned oxygen containing...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reissue Patent

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Heat-transfer-stamp process for thermal imprint lithography

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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