Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent
1994-02-24
1995-07-04
Breneman, R. Bruce
Etching a substrate: processes
Etching of semiconductor material to produce an article...
251331, B44C 122
Patent
active
054297133
ABSTRACT:
Described is a method of manufacturing a silicious micro-valve comprising the steps of providing a first silicious substrate; removing a portion of the first substrate to reveal the 111 planes of the first substrate; drawing an epitaxial layer to conform to the 111 planes of the first substrate; and assembling the first substrate and the epitaxial layer as two separate identical pieces to form a micro-valve having 111 planes.
REFERENCES:
patent: 4647013 (1987-03-01), Giachino et al.
patent: 4657621 (1987-04-01), Johnson et al.
patent: 4670092 (1987-06-01), Motamedi
patent: 4756508 (1988-07-01), Giachino et al.
patent: 4768751 (1988-09-01), Giachino et al.
patent: 4826131 (1989-05-01), Mikkor
patent: 4869282 (1989-09-01), Sittler et al.
patent: 4966646 (1990-10-01), Zdeblick
patent: 5029805 (1991-07-01), Albarda et al.
patent: 5065978 (1991-11-01), Albarda et al.
patent: 5074629 (1991-12-01), Zedblick
patent: 5082242 (1992-01-01), Bonne et al.
patent: 5161774 (1992-11-01), Engelsdorf et al.
patent: 5244537 (1993-09-01), Ohnstein
patent: 5277755 (1994-01-01), O'Neil
"Variable-Flow Micro-Valve Structure Fabricated With Silicon Fusion Bonding", Pourahmadi et al, NovaSensor, Fremont, Calif., 1990 IEEE, pp. 78-81.
"Smallest Dead Volume Microvalves For Integrated Chemical Analyzing Systems", Shoji et al, Dept. of Precision Eng., Tohoku University, 1991 IEEE, pp. 1052-1055.
"Electrically Activated, Normally-Closed Diaphragm Valves", Hal Jerman, IC Sensors, Milpitas, Calif., 1991 IEEE, pp. 1045-1048.
Avant Carlton S.
Eagen Charles F.
Stevenson Paul E.
Breneman R. Bruce
Chang Joni Y.
Ford Motor Company
Malleck Joseph W.
May Roger L.
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