Selective etching method

Selective etching of oxides from substrates

Self-aligned construction and manufacturing process for monolith

Self-aligned micro hinges

Self-supporting thin-film filament detector, process for its man

Semiconductor device capacitor fabrication method

Semiconductor device incorporating hemispherical solid...

Semiconductor etching process to release single crystal...

Semiconductor micromachine and manufacturing method thereof

Semiconductor probe with high resolution resistive tip and...

Semiconductor sensor having suspended thin-film structure and me

Si substrate and method of processing the same

Silicon-containing structure with deep etched features, and...

Simplified etching technique for producing multiple undercut...

Single SOI wafer accelerometer fabrication process

Small scale actuators and methods for their formation and use

Solid state membrane channel device for the measurement and...

Spatial light modulator with multi-layer landing structures

Sputtered spring films with low stress anisotropy

Staggered torsional electrostatic combdrive and method of...