Method of making an X-Y axis dual-mass tuning fork gyroscope...

Details Method of making an X-Y axis dual-mass tuning fork gyroscope... Method of making an X-Y axis dual-mass tuning fork gyroscope...

2007-07-31

2007-07-31

Ahmed, Shamim (Department: 1765)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C216S067000, C216S088000, C216S089000, C073S504020

Reexamination Certificate

active

11193127

ABSTRACT:
A method for making an angular velocity sensor having two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame is provided. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame.

REFERENCES:
patent: 5359893 (1994-11-01), Dunn
patent: 5780740 (1998-07-01), Lee et al.
patent: 5895850 (1999-04-01), Buestgens
patent: 5992233 (1999-11-01), Clark
patent: 6122961 (2000-09-01), Geen et al.
patent: 6189381 (2001-02-01), Huang et al.
patent: 6250157 (2001-06-01), Touge
patent: 6391673 (2002-05-01), Ha et al.
patent: 6430998 (2002-08-01), Kawai et al.
patent: 6480320 (2002-11-01), Nasiri
patent: 6481283 (2002-11-01), Cardarelli
patent: 6481284 (2002-11-01), Geen et al.
patent: 6481285 (2002-11-01), Shkel et al.
patent: 6487908 (2002-12-01), Geen et al.
patent: 6508122 (2003-01-01), McCall et al.
patent: 6513380 (2003-02-01), Reeds, III et al.
patent: 6533947 (2003-03-01), Nasiri et al.
patent: 6794272 (2004-09-01), Turner et al.
patent: 6796178 (2004-09-01), Jeong et al.
patent: 6939473 (2005-09-01), Nasiri et al.
patent: 2003/0074967 (2003-04-01), Tang et al.
patent: 2003/0110858 (2003-06-01), Kim et al.
patent: 2003/0164041 (2003-09-01), Jeong et al.
patent: 2004/0055380 (2004-03-01), Shcheglov et al.

Affiliated with

Also associated with

Rating

Method of making an X-Y axis dual-mass tuning fork gyroscope... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making an X-Y axis dual-mass tuning fork gyroscope..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making an X-Y axis dual-mass tuning fork gyroscope... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3818747