Fabrication and controlled release of structures using...
Fabrication of a microchannel plate from a perforated silicon
Fabrication of a reflective spatial light modulator
Fabrication of a surface micromachined capacitive microphone usi
Fabrication of electronic magnetic, optical, chemical, and...
Fabrication of etched features
Fabrication of MEMS devices with spin-on glass
Fabrication of microchip drug delivery devices
Fabrication of molecular scale devices using fluidic assembly
Fabrication of single-crystal silicon structures using sacrifici
Fabrication of suspended structures using a sacrificial layer
Fabrication of three dimensional structures
Fiducial marks for charged-particle-beam exposure apparatus and
Flexural plate wave sensor
Fluorochemical treatment for silicon articles
Formation of atomic scale vertical features for topographic inst