Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent
1998-07-30
2000-08-01
Gulakowski, Randy
Etching a substrate: processes
Etching of semiconductor material to produce an article...
216 24, 264 125, 264 22, 264 25, 264 27, B29D 1100
Patent
active
060962291
ABSTRACT:
A method for making an optical connector support member. The method can be broadly summarized by the following steps: One or more features are partially etched in a monocrystalline substrate to form a template. The features are etched in the substrate to a depth necessary to form the functional portions of the features. An inverse replica is created and then separated from the template. Additional material is bonded to the inverse replica in the regions that correspond to the features that were partially etched in the monocrystalline substrate. The inverse replica with the additional material bonded thereto is then used as a pattern for making a support member. A multi-fiber support member made using the inverse replica described in the foregoing will have one or more features formed therein that correspond to the features etched in the monocrystalline substrate, but are deeper because of the additional material that was bonded to the inverse replica.
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patent: 5603870 (1997-02-01), Roll et al.
patent: 5632908 (1997-05-01), Shahid
patent: 5639387 (1997-06-01), Shahid
Gulakowski Randy
Lucent Technologies - Inc.
Olsen Allan
LandOfFree
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