4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...
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Use of an organic dielectric as a sacrificial layer

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Use of chemical mechanical polishing in micromachining

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent

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