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Parylene micro check valve and fabrication method thereof

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Pattern-transfer process for forming...

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Photonic sensor particles and fabrication methods

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Photonic sensor particles and fabrication methods

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Polarization rotators

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Polyimide as a mask in vapor hydrogen fluoride etching

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Polymeric coatings for micromechanical devices

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Probe tip configuration and a method of fabrication thereof

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Process for fabricating a feeler member for a micromechanical pr

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Process for fabricating monolithic membrane substrate...

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Process for high yield fabrication of MEMS devices

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Process for manufacture of micro electromechanical devices havin

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Process for manufacturing a pressure-difference sensor

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Process for minute processing of diamonds

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Process for packaging electronic devices using thin bonding...

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Process for producing a micromotion mechanical structure

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Process for producing a sensor membrane substrate

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Process for producing a speed of rotation coriolis sensor

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Process for producing surface micromechanical structures

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Process for removing a coating from a hole in a metal substrate

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