Plasma CVD process for coating a dome-shaped substrate
Plasma CVD process for forming a fluorine-doped SiO.sub.2 dielec
Plasma CVD process for forming amorphous silicon thin film
Plasma CVD process for metal films and metal nitride films
Plasma CVD system with an array of microwave plasma...
Plasma deposition apparatus and deposition method utilizing...
Plasma deposition apparatus and method for making...
Plasma deposition method and an apparatus therefor
Plasma enhanced ALD of tantalum nitride and bilayer
Plasma enhanced atomic layer deposition system and method
Plasma enhanced chemical transport process for forming diamond f
Plasma enhanced chemical vapor deposition (PECVD) method of form
Plasma enhanced chemical vapor deposition method of forming...
Plasma enhanced chemical vapor deposition methods of forming hem
Plasma enhanced chemical vapor deposition of oxide film stack
Plasma enhanced CVD process for fluorinated silicon nitride film
Plasma enhanced OMCVD of thin film coating for polymeric fibers
Plasma film forming method utilizing varying bias electric...
Plasma immersion ion processing for coating of hollow...
Plasma jet CVD method of depositing diamond or diamond-like film