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Vacuum processing apparatus and vacuum processing method

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Vacuum processing method

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Vacuum treatment system for homogeneous workpiece processing

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent

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Vapor phase deposition of hydrogen silsesquioxane resin in the p

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent

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