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DC plasma jet CVD method for producing diamond

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Decontamination of a plasma reactor using a plasma after a chamb

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Deposited film forming apparatus and deposited film forming...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Deposition and chamber treatment methods

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Deposition chamber and method for depositing low dielectric...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Deposition chamber and method for depositing low dielectric...

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Deposition method for forming a film including metal,...

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Deposition of high quality conformal silicon oxide thin films fo

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Deposition of high quality conformal silicon oxide thin films on

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Deposition of high quality diamond film on refractory nitride

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Deposition of silicon nitride by plasma-enchanced chemical vapor

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Deposition of silicon nitrides by plasma-enhanced chemical vapor

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Deposition of TEOS oxide using pulsed RF plasma

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Deposition of tungsten nitride by plasma enhanced chemical...

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Deposition of tungsten nitride using plasma pretreatment in...

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Deposition process for high aspect ratio trenches

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Deposition processes for titanium nitride barrier and aluminum

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Device and control method for micro wave plasma processing

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Device and method for plasma processing

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Device and method for the vacuum plasma processing of objects

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