Large-scale, low pressure plasma-ion deposition of diamondlike c
Laser ablation, low temperature-fabricated yttria-stabilized...
Laser absorption wave deposition process and apparatus
Layer formation method, and substrate with a layer formed by...
Layer forming method, product comprising the layer, optical...
Layer-forming method using plasma state reactive gas
Liquid solution of TiBr.sub.4 in Br.sub.2 used as a precursor fo
Low pressure growth of cubic boron nitride films
Low temperature crystallization and patterning of amorphous sili
Low temperature method for synthesizing diamond with high qualit
Low temperature plasma enhanced CVD process within tubular membe
Low temperature process to produce low-K dielectrics with...
Low temperature, high quality silicon dioxide thin films deposit
Low temperature, high quality silicon dioxide thin films...
Low-temperature oxidation at surfaces using ozone decomposition
Low-temperature plasma-enhanced chemical vapor deposition of sil
LPCVD process for depositing titanium films for semiconductor de