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Tantalum and tantalum-based films and methods of making the same

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Tantalum and tantalum-based films formed using fluorine-containi

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Technique for improving chucking reproducibility

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Thermal pyrolysising chemical vapor deposition method for...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Thin film forming equipment and method

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Thin film forming method

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Thin film forming method

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Titanium nitride thin film formation on metal substrate by...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Transmission line for providing power to an electrode boat in a

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Tubular carbon nano/micro structures and method of making same

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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