Tantalum and tantalum-based films and methods of making the same
Tantalum and tantalum-based films formed using fluorine-containi
Technique for improving chucking reproducibility
Thermal pyrolysising chemical vapor deposition method for...
Thin film forming equipment and method
Thin film forming method
Thin film forming method
Titanium nitride thin film formation on metal substrate by...
Transmission line for providing power to an electrode boat in a
Tubular carbon nano/micro structures and method of making same