Sequential chemical vapor deposition
Shallow trench isolation filled by high density plasma chemical
Sheet plasma CVD apparatus
Silica microspheres, method for making and assembling same...
Silicon device production
Silicon dioxide deposition by plasma activated evaporation...
Silicon nitride thin films with improved properties
Silicon nitrogen-based films and method of making the same
Silicon oxide film formation method
Silicon oxide film, method of forming the silicon oxide...
Single and multilayer coatings containing aluminum nitride
Single chamber CVD process for thin film transistors
Solution for FSG induced metal corrosion & metal...
Staggered in-situ deposition and etching of a dielectric...
Staggered in-situ deposition and etching of a dielectric...
Staggered in-situ deposition and etching of a dielectric...
Structure and method for incorporating an inductively coupled pl
Substrate heating mechanism
Substrate processing chamber with tunable impedance
Substrate processing methods