Aerosol-plasma deposition of films for electrochemical cells
Amorphous hydrogenated silicon-carbon alloys and solar cells and
Amorphous multi-layered structure and method of making the same
Amorphous silicon film, its production and photo semiconductor d
Apparatus and method for applying RF power apparatus and method
Apparatus and method for depositing large area coatings on...
Apparatus and method for forming deposited film
Apparatus and method for forming diamond coating
Apparatus and method for performing a PCVD process
Apparatus and method of gas injection sequencing
Apparatus and methods for plasma vapor deposition processes
Apparatus and methods for plasma vapor deposition processes
Apparatus and process for forming a deposited film
Apparatus for forming a deposited film by plasma chemical...
Apparatus for forming films on a substrate
Apparatus for producing diamonds by chemical vapor deposition an
Application of a coating forming material onto at least one...
Arc assisted CVD coating and sintering method
Arc assisted CVD coating method and apparatus
Arc discharge plasma CVD method for forming diamond-like carbon