Plasma CVD process for coating a dome-shaped substrate

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma

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427163, 427166, 4272481, 188723, B05D 306

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051549433

ABSTRACT:
A plasma-CVD process and apparatus for coating strongly arched, dome-like substrates with a dielectric and/or metallic coating system on the inside and/or outside face. The thickness of the gas layer to be reacted above the face to be coated is adjusted such as with the aid of the displacement body, so that the extent of the homogeneous reaction or formation occurring in the gas layer during a plasma phase is harmless for the desired coating quality. Strongly arched substrates coated with a uniform coating of highest optical quality and also mechanical, thermal and chemical stability without complicated substrate movement. Specified axial and azimuthal coating thickness profiles can also be superimposed by suitably shaping the displacement body.

REFERENCES:
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patent: 3926508 (1975-12-01), Harmsen et al.
patent: 4602847 (1986-07-01), Born et al.
patent: 4868004 (1989-09-01), Zultzke et al.
patent: 5030475 (1991-07-01), Ackermann et al.
C. M. Wolfe, Journal of the Electrochemical Society, Nov. 1974 pp. 1506-1509.
Patent Abstracts of Japan, vol. 13, No. 145, Apr. 10, 1989.

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