Reaction chamber design and method to minimize particle generati
Reducing hydrogen concentration in pecvd amorphous silicon carbi
Replaceable plate expanded thermal plasma apparatus and method
RF current return path for a large area substrate plasma...
RF plasma reactor and methods of generating RF plasma
RF plasma reactor having a distribution chamber with at...
RF plasma-enhanced deposition of fluorinated films
Roll-vortex plasma chemical vapor deposition method
Rugate filter and method of making same