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Self-centering wafer support system

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Self-cleaning focus ring

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Semiconductor crystal growth apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Semiconductor device fabrication chamber cleaning method and...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Semiconductor device manufacturing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Semiconductor device manufacturing apparatus and...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Semiconductor device manufacturing apparatus employing vacuum sy

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Semiconductor device manufacturing apparatus having...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Semiconductor device manufacturing system capable of...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Semiconductor device manufacturing unit

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Semiconductor device, manufacturing method, and system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Semiconductor device, manufacturing method, and system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Semiconductor fabricating apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Semiconductor fabricating apparatus, method for controlling oxyg

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Semiconductor fabrication apparatus with a handler

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Semiconductor fabrication equipment

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Semiconductor film formation device

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Semiconductor manufacturing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Semiconductor manufacturing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Semiconductor manufacturing apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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