4. Coating apparatus
  5. Gas or vapor deposition
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Microwave plasma CVD apparatus having an improved microwave tran

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma CVD apparatus having substrate shielding member

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma CVD apparatus provided with a microwave transmi

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma CVD apparatus with a deposition chamber having

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma etching apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma film deposition system

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma film deposition system

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma generator

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma generator

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma processing apparatus and method therefor

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma processing apparatus and processing method usin

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma processing apparatus having a vacuum pump...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma processing system

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma processing system

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma processing system

Coating apparatus – Gas or vapor deposition – With treating means
Patent

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Microwave plasma processor

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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