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Method for fabricating superconducting materials and superconduc

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Method for forming a deposited film by plasma chemical vapor dep

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method for forming a thin layer on a semiconductor substrate and

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method for forming a thin semiconductor film and a plasma CVD ap

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method for forming oxide film of semiconductor device, and...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method for igniting a plasma in a plasma processing chamber

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Method for insulating film formation, storage medium from...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Method for making films utilizing a pulsed laser for ion...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method for PECVD deposition of selected material films

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method for producing coated workpieces, uses and...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method for producing non-monocrystalline semiconductor device an

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Method for producing of polycrystalline silicon and apparatus th

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Method for surface treatment

Coating apparatus – Gas or vapor deposition – Object embedded in particulate mass
Patent

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Method for synthesis of diamond

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method for the plasma assisted high vacuum physical vapor coatin

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method for the treatment of a web-type material in a...

Coating apparatus – Gas or vapor deposition – Running length work
Reexamination Certificate

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Method for transforming a liquid flow into a gas flow and a devi

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Method of an apparatus for forming thin film for semiconductor d

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Method of and apparatus for a direct voltage arc discharge enhan

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method of and apparatus for controlling plasma potential and eli

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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