Method of and apparatus for controlling plasma potential and eli

Details Method of and apparatus for controlling plasma potential and eli Method of and apparatus for controlling plasma potential and eli

1998-04-15

2000-10-03

Tudor, Harold J.

Coating apparatus

Gas or vapor deposition

With treating means

C23C 1600

Patent

active

H00018686

ABSTRACT:
A method of and apparatus for controlling the potential of a plasma including a metal-walled chamber and a conductive coil which carries a radio-frequency current and is wrapped around the metal-walled chamber to produce a plasma within the chamber. A filament made of refractory metal has two ends, and a central portion formed in the shape of a probe. The central portion of the filament extends into the interior of the chamber and the two ends of the filament pass through a wall of the chamber to the exterior of the chamber. A heating power supply is connected to the two ends to the filament and to the chamber wall for heating the filament to a predetermined temperature above that of the plasma. The heated filament produces thermionic emissions from the filament to the plasma in order to control the plasma potential and eliminate unipolar arcing at the chamber wall.

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