Method for producing coated workpieces, uses and...

Details Method for producing coated workpieces, uses and... Method for producing coated workpieces, uses and...

2005-07-19

2005-07-19

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S7230HC, C118S7230ER

Reexamination Certificate

active

06918352

ABSTRACT:
A system and a method produce workpieces coated by PECVD with a quality sufficient for epitaxy. Included are a vacuum recipient, a plasma discharge source operationally connected to the vacuum recipient and a workpiece holder within the vacuum recipient, said plasma discharge source generating on said workpiece holder ions with an energy of below 15 eV. The plasma discharge source can be a low-voltage plasma discharge source in which at least one cathode is arranged within a cathode chamber coupled to the vacuum recipient by a diaphragm.

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