Substrate and method for producing the same, and thin film...

Substrate preparation method for a MEMS fabrication process

Substrate with multiple encapsulated pressures

Surface micro-machined sensor with pedestal

Surface micromachining process

Surface micromachining process for manufacturing...

Surface micromachining using a thick release process

Surface shape recognition sensor and method of manufacturing...

System and method of encapsulation

System and method of fabricating micro cavities

Systems with high density packing of micromachines

Technique for fabricating MEMS devices having diaphragms of...

Temperature coefficient of offset adjusted semiconductor device

Thin film capacitor, method for manufacturing the same and...

Thin film getter protection

Thin film microshells incorporating a getter layer

Thin film resonator and method for manufacturing the same

Thin micromachined structures

Thin-film structure and method for manufacturing the same,...

Thin-film structure and method for manufacturing the same,...