Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Patent
1997-09-03
1999-11-30
Picardat, Kevin M.
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
438 50, 73720, 73726, H01L 2100
Patent
active
059941618
ABSTRACT:
A non-zero temperature coefficient of offset (Tco) in a semiconductor device (5) is adjusted by reducing the amount of adhesive material used to secure a first structure to a second structure. An adhesive layer (14) used to secure a sensor die (11) to a constraint die (12) in a pressure sensor application is reduced in thickness and/or formed so that adhesive material does not completely cover the constraint die (12). The Tco is further adjusted by reducing the amount and/or patterning the adhesive layer (18) used to secure the sensor (10) to its package (16).
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Bitko Gordon D.
McNeil Andrew C.
Monk David J.
Chen George C.
Coleman Sharon K.
Motorola Inc.
Picardat Kevin M.
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