Multiple stage MEMS release for isolation of similar materials

Nanoelectromechanical transistors and switch systems

Nanotube semiconductor structures with varying electrical...

Nanotube tip for atomic force microscope

Near-field optical probe based on SOI substrate and...

Optical die-down quad flat non-leaded package

Optically coupled sealed-cavity resonator and process

Orientation-dependent etching of deposited AlN for...

Package for a micro-electro mechanical device

Package, in particular for MEMS devices and method of making...

Passivation/patterning of PZR diamond films for high temperature

Passive electrically testable acceleration and voltage...

Patterned growth of single-walled carbon nanotubes from...

Piezo-diode cantilever MEMS fabrication method

Piezoelectric device and cover sealing method and apparatus...

Piezoelectric device with sealed vibration space and...

Piezoelectric/electrostrictive film type elements and...

Piezoresistive sensing structure

Placing a MEMS part on an application platform using a guide...

Polycrystalline silicon germanium films for forming...