Passivation/patterning of PZR diamond films for high temperature

Details Passivation/patterning of PZR diamond films for high temperature Passivation/patterning of PZR diamond films for high temperature

1996-03-14

1997-04-22

Trinh, Michael

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

438763, 438958, 438791, H01L 2131, H01L 2177

Patent

active

056229020

ABSTRACT:
A method for passivating diamond films to substantially prevent them from oxidizing at temperatures up to 800.degree. C. in an oxygen atmosphere. The method involves depositing one or more passivating layers over the diamond film wherein one of the layers is nitride and the other layer is quartz. The passivation technique is directly applicable to diamond sensor pressure transducers and enable them to operate at temperatures above 800.degree. C. in oxygen environments. The passivation technique also provides an economical and simple method for patterning diamond films.

REFERENCES:
patent: H1287 (1994-02-01), Zeisse et al.
patent: 3800264 (1974-03-01), Kurtz et al.
patent: 3930823 (1976-01-01), Kurtz et al.
patent: 5135885 (1992-08-01), Furukawa et al.
patent: 5165283 (1992-11-01), Kurtz et al.
patent: 5303594 (1994-04-01), Kurtz et al.
patent: 5451430 (1995-09-01), Anthony et al.
patent: 5514603 (1996-05-01), Sato
patent: 5538911 (1996-07-01), Yamazaki
J.L. Davidson, R. Ramasham, C. Ellis, J. Electrochem. Soc., 137, 10 (1990) pp. 3206-3210.
D.R. Wur, J.L. Davidson, W.P. Kang, D.L. Kinser, IEEE J Microelectromech. Syst. 4, 1 pp. 34-41, (1995).
J.L. Davidson, J.S. Shor, D.R. Wur, and A.D. Kurtz, J. Electrochem. Soc., 141, 12, pp. 3522-3525, (1994).
Michael W. Geis and John C. Angus, "Diamond Film Semiconductors", Scientific American, pp. 84-89, Oct. 1992.

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