Multiple stage MEMS release for isolation of similar materials

Details Multiple stage MEMS release for isolation of similar materials Multiple stage MEMS release for isolation of similar materials

2005-12-20

2010-11-23

Fulk, Steven J (Department: 2891)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C257SE21251

Reexamination Certificate

active

07838321

ABSTRACT:
This describes a starting structure and method for forming a micro-mechanical device. These devices have several uses in both government and commercial applications. The starting structure can be sold or supplied to others who will then make a final product, or it can be used directly to make a final product. An appropriate use of this starting structure is to make deformable devices useful in an inkjet printing device.

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patent: 2003/0058069 (2003-03-01), Schwartz et al.
patent: 2003/0138986 (2003-07-01), Bruner
patent: 2003/0153116 (2003-08-01), Carley et al.
patent: 2004/0147132 (2004-07-01), Nam et al.

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