Placing a MEMS part on an application platform using a guide...

Details Placing a MEMS part on an application platform using a guide... Placing a MEMS part on an application platform using a guide...

2008-01-30

2010-10-12

Sefer, A. (Department: 2893)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S053000, C438S455000, C257S415000, C257S416000, C257S417000, C257S418000, C257S419000, C257S420000, C257SE29324, C029S842000, C029S874000, C428S307300

Reexamination Certificate

active

07811849

ABSTRACT:
A method for fabricating a micro-electro-mechanical system (MEMS) device. The method comprises placing a guiding mask on an application platform, the guiding mask including an opening that defines the position of a MEMS part to be placed on the application platform. The method further comprises placing the MEMS part into the opening of the guiding mask on the application platform, and removing the guiding mask from the application platform after the MEMS part is bonded to the application platform.

REFERENCES:
patent: 4773877 (1988-09-01), Kruger et al.
patent: 5798283 (1998-08-01), Montague et al.
patent: 6672875 (2004-01-01), Mathieu et al.
patent: 6784680 (2004-08-01), Haga et al.
patent: 6965245 (2005-11-01), Kister et al.
patent: 7048548 (2006-05-01), Mathieu et al.
patent: 7078921 (2006-07-01), Haga et al.
patent: 7151385 (2006-12-01), Hirata et al.
patent: 7156706 (2007-01-01), Brown et al.
patent: 7190179 (2007-03-01), Haga et al.
patent: 7285966 (2007-10-01), Lee et al.
patent: 7567089 (2009-07-01), Chen et al.
patent: 7586321 (2009-09-01), Hirakawa et al.
patent: 2006/0192581 (2006-08-01), Lee
patent: 2008/0111573 (2008-05-01), Chen et al.
patent: 2008/0184559 (2008-08-01), Soma et al.

Affiliated with

Also associated with

Rating

Placing a MEMS part on an application platform using a guide... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Placing a MEMS part on an application platform using a guide..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Placing a MEMS part on an application platform using a guide... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4241207