Semiconductor probe with resistive tip and method of...

Details Semiconductor probe with resistive tip and method of... Semiconductor probe with resistive tip and method of...

2006-09-27

2008-10-28

Lindsay, Jr., Walter (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S758000, C438S770000, C257SE29141, C324S754090, C324S762010

Reexamination Certificate

active

07442571

ABSTRACT:
Provided are a semiconductor probe having a resistive tip, a method of fabricating the semiconductor probe, and a method of recording and reproducing information using the semiconductor probe. The semiconductor probe includes a tip and a cantilever. The tip is doped with first impurities. The cantilever has an end portion on which the tip is positioned. The tip includes a resistive area, and first and second semiconductor electrode areas. The resistive area is positioned at the peak of the tip and lightly doped with second impurities that are different from the first impurities. The first and second semiconductor electrode areas are heavily doped with the second impurities and contact the resistive area.

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