Semiconductor dynamic sensor, and methods of transport and...

Details Semiconductor dynamic sensor, and methods of transport and... Semiconductor dynamic sensor, and methods of transport and...

2006-02-28

2006-02-28

Chapman, John E. (Department: 2856)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C414S752100, C414S941000

Reexamination Certificate

active

07005313

ABSTRACT:
A semiconductor dynamic sensor has a displacement portion, which is composed of a movable electrode and first and second fixed electrodes, formed in a semiconductor substrate. The movable electrode is displaced in response to applied acceleration, so that capacitance between the movable electrode and each of the first and second fixed electrodes changes. Therefore, the applied acceleration can be detected based on the capacitance change. A plurality of rectangular-shaped suction portions is provided at four corners on the surface of the semiconductor substrate. By sucking the suction portions using a collet check, the semiconductor dynamic sensor such can be transported without damaging the displacement portion.

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